Dear Valued Customers,
We offer you to download some products and applications presentations.
Horiba Jobin Yvon Process Control products are based on Optical Emission Spectroscopy (OES) or Interferometry (INT).
Products: LEM, LEM-CT, DM-1000, EV-1000, EV-140C-P, Recipe Designer 7
Keyword: Dry Etch, PECVD, Cleaning, FA --- Semiconductor, MEMS --- OES, Interferometry --- Deep Trench --- Cluster tool
Real-time & In-situ Diagnosis, Plasma Monitoring, Endpoint Control, Fault detection, Yield & Throughput
Advertisements. Click below for immediate NEWS on Products, Softwares and Applications:
· INT: NEW LEM camera at 808 nm (2016) for II-VI applications,…
· INT+OES: Plasma Process Engineering – Twin mode ( 2014). Enjoy one product with both sensors, LEM camera for Interferometry and EV-140 sensor for OES
· INT: Is your Black LEM camera obsolete ? Upgrade it! (06/ 2014)
· INT, OES: EV-1000 Endpoint Supervision for Dry Etch Cluster tools (10/2013)
· OES: Recipe Designer 7 for smart OES Engineering (11/2013)
· INT: LEM-CT 2013 is ready (10/2013)
· INT: Horiba announces Digilem Camera family (1/6/2006)
Product line catalog.
· INT, OES: Endpoint product line leaflet (2018)
Endpoint Products information, use those links.
· OES: EV 2.0 : NEW Plasma Diagnosis OES Endpoint Monitor (2018)
Oral Presentation. Click and listen (female English voice) to obtain an overview of our products and applications.
· OES: EV-140C oral presentation
· INT: LEM-CT oral presentation
2010 Process Control Products Presentation.
· INT, OES: Real Time Etching End Point Monitors (OES & Interferometer type)
Applications Notes and articles.
· INT: Bosch Process
MONITORING ON LOW OPEN AREA STEPS BY OPTICAL EMISSION SPECTROSCOPY.
Endpoint and Health monitoring. Collaboration with Altis Fab in
· OES: Applications of Plasma Emission Endpoint Monitor EV-140C (Horiba Readout, February 2011)
· OES: EV-140 P, New Emission Spectroscopic Product for Semiconductor Endpoint, Cleaning and Plasma Chambers Control (Horiba Readout, Sept. 2012)
Our Products appear on customers web site.
· INT: LEM upgrade on Oxford tools (10/2012)
· INT: IEMN, France
· INT: LEM on Oxford tools
· INT: LEM on Oxford PlasmaPro 800
· INT: IEF, France
· INT: LMN
· INT: LMN brochure
Our Products appear on customers articles.
· INT, OES: In-situ Monitoring
Thank you for coming back for more information.
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